The theoretical and experimental research in the area of MEMS/NEMS combines fundamental and applied aspects.  Better understanding of complex, typically nonlinear, dynamic phenomena, gained during extensive theoretical and experimental investigation, serves as the foundation for development of new designs and operational concepts of micro sensors. Since a large number of structures with different parameters can be fabricated on a single chip and tested, micro technology can serve as a highly convenient and versatile experimental platform for the exploration of nonlinear structural dynamics.